Effect of Nitrogen Gas Flow Rate on Properties of Diamond Like Carbon Films Prepared by Magnetron Sputtering

Autor:	翟子豪 Zhai Zi-hao, 杨艳 Yang Yan, 沈鸿烈 Shen Hong-lie, 王洪美 Wang Hong-mei, 李玉芳 Li Yu-fang, 杨家乐 Yang Jia-le, 陈洁仪 Chen Jie-yi
Rok vydání:	2019
Předmět:	Materials science Carbon film Chemical engineering Material properties of diamond Nitrogen gas Sputter deposition Atomic and Molecular Physics and Optics Volumetric flow rate
Zdroj:	ACTA PHOTONICA SINICA. 48:416003
ISSN:	1004-4213
DOI:	10.3788/gzxb20194804.0416003
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2312c32dd2bd1ecb0c7874f09dc2feba https://doi.org/10.3788/gzxb20194804.0416003 Zobrazit plný text záznamu