Novel self-compensation method to lower the temperature drift of a quartz MEMS gyroscope
| Autor: | Ke Zhao, Aiying Yang, Jianmin Cui, Yu-nan Sun, Wenjun Gu, Lihui Feng, Fang Cui |
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| Rok vydání: | 2014 |
| Předmět: |
Digital electronics
Materials science business.industry Acoustics Vibrating structure gyroscope Phase (waves) Condensed Matter Physics Stability (probability) Electronic Optical and Magnetic Materials Nonlinear system Amplitude Hardware and Architecture Control theory Electrical and Electronic Engineering business Electrical impedance Quartz |
| Zdroj: | Microsystem Technologies. 20:2231-2237 |
| ISSN: | 1432-1858 0946-7076 |
| DOI: | 10.1007/s00542-014-2113-z |
| Popis: | A new self-compensation method is proposed in this paper. The impedance of a quartz tuning fork changes along with the temperature. A digital driving circuit is designed so that the frequency can be adjusted by controlling the phase. The relationship between the driving amplitude and the temperature is captured in a digital circuit, which can reflect the temperature information. As the relationship is nonlinear, after third-order fitting, the temperature has a precision of 2.356 °C. Finally, the bias stability is optimized and the drift decreases to 1.7 %. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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