A Low Cost Angular Rate Sensor in Si-Surface Micromachining Technology for Automotive Application

Autor:	Karsten Funk, Stefan Pinter, Wolfram Bauer, Helmut Baumann, Harald Emmerich, L. Tanten, Andreas Thomae, Gunar Lorenz, Ralf Schellin, Jiri Marek, M. Lang, Reinhard Neul, J. Mohaupt, Georg Bischopink
Rok vydání:	1999
Předmět:	Surface micromachining Materials science Angular rate sensor business.industry Automotive industry business Automotive engineering
Zdroj:	SAE Technical Paper Series.
ISSN:	0148-7191
DOI:	10.4271/1999-01-0931
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::22f51ca7564442d64862c4c28adf3a18 https://doi.org/10.4271/1999-01-0931 Zobrazit plný text záznamu