Development of cantilever integrated three-dimensional micro stages and application to tribological study
| Autor: | Daichi Takahara, Yasuhisa Ando |
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| Rok vydání: | 2016 |
| Předmět: | |
| Zdroj: | The Proceedings of the Machine Design and Tribology Division meeting in JSME. :A5-4 |
| ISSN: | 2424-3051 |
| DOI: | 10.1299/jsmemdt.2016.16.a5-4 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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