Room temperature bonding of micromachined glass devices for capillary electrophoresis
| Autor: | Cameron Skinner, D. Jed Harrison, Nghia Chiem, Per Andersson, Loranelle Lockyear-Shultz |
|---|---|
| Rok vydání: | 2000 |
| Předmět: |
Materials science
Capillary action business.industry Microfluidics Metals and Alloys Analytical chemistry Condensed Matter Physics Thermal expansion Surfaces Coatings and Films Electronic Optical and Magnetic Materials Electrophoresis Planar Capillary electrophoresis Materials Chemistry Optoelectronics Theoretical plate Electrical and Electronic Engineering business Instrumentation Quartz |
| Zdroj: | Sensors and Actuators B: Chemical. 63:147-152 |
| ISSN: | 0925-4005 |
| Popis: | We report a simple method to bond glass at room temperature for microfluidic applications, which is based on rigorous cleaning [K. Fluri, G. Fitzpatrick, N. Chiem, D.J. Harrison, Integrated capillary electrophoresis devices with an efficient postcolumn reactor in planar quartz and glass chips, Anal. Chem. 68 (1996) 4285–4290; N. Chiem, D.J. Harrison, Microchip-based capillary, Anal. Chem. 69 (1997) 373–378; D. Sobek, A.M. Young, M.L. Gray, S.D. Senturia, A microfabricated flow chamber for optical measurements influids, Proc. IEEE Micro-Electromechanical Systems Workshop, Fort Lauderdale, FL, Feb 7–10, 1993, pp. 219–224.] of the glass substrates before bonding. Low applied pressure on micromachined glass substrates contacted at 20°C provides devices, which are robustly bonded. These devices are able to withstand routine handling, and be used for capillary electrophoresis for as long as 2 years. Separation efficiencies as high as 90,000 theoretical plates were observed at 6–8 kV applied, comparable to 100,000 observed in devices bonded at 440–650°C. A wide range of the same or different types of commercially available glass can be bonded without heat treatment, alleviating the need for a good match in thermal expansion coefficients between the glasses. |
| Databáze: | OpenAIRE |
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