Experimental investigation of the energy distribution of sputtered excited target atoms bombarded by medium-energy ions

Autor:	V. P. Shestov, S. V. Teplov
Rok vydání:	1985
Předmět:	Materials science Distribution function Sputtering Excited state General Physics and Astronomy Partial pressure Atomic physics Kinetic energy Charged particle Excitation Ion
Zdroj:	Soviet Physics Journal. 28:182-184
ISSN:	1573-9228 0038-5697
DOI:	10.1007/bf00895899
Popis:	In this paper we experimentally investigate the parameter dependence of a model energy distribution of excited potassium atoms, knocked out by bombarding a KCl monocrystal with normally incident Ar+ ions, on the ion energy and the partial oxygen pressure in the chamber. On the basis of the obtained results a model of the energy distribution is proposed that corresponds to the kinetic formation mechanism for the excited atoms during the sputtering of the target.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::22cb639ce1f8603c7d5ebf8550e336e1 https://doi.org/10.1007/bf00895899 Zobrazit plný text záznamu Full text from SpringerLink