Fabrication and characterization of integrated optical waveguides in sulfide chalcogenide glasses
Autor: | Kathleen Richardson, J.-F. Viens, Michel A. Duguay, Tigran Galstian, Alain Villeneuve, C. Meneghini, Thierry Cardinal, E.J. Knystautas |
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Rok vydání: | 1999 |
Předmět: |
chemistry.chemical_classification
Fabrication Materials science Sulfide business.industry Chalcogenide Physics::Optics Chalcogenide glass Photosensitive glass Condensed Matter::Disordered Systems and Neural Networks Atomic and Molecular Physics and Optics Computer Science::Other law.invention chemistry.chemical_compound Optics Ion implantation chemistry law Optoelectronics Photolithography business Lithography |
Zdroj: | Journal of Lightwave Technology. 17:1184-1191 |
ISSN: | 0733-8724 |
Popis: | This paper reports on the fabrication process of As-S-(Se)-based chalcogenide glass optical waveguides using three techniques: photolithography, laser beam writing, and ion implantation. The fabrication method of the bulk sulfide glasses and the processing of integrated devices are described and assessed in light of the propagation characteristics and optical losses in each case. |
Databáze: | OpenAIRE |
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