Plasma-Deposited Amorphous Hydrogenated Carbon Films and Their Tribological Properties
| Autor: | Kazuhisa Miyoshi, John J. Pouch, Samuel A. Alterovitz |
|---|---|
| Rok vydání: | 1991 |
| Předmět: |
Materials science
Mechanical Engineering chemistry.chemical_element Tribology Condensed Matter Physics Amorphous solid Carbon film Amorphous carbon chemistry Mechanics of Materials visual_art visual_art.visual_art_medium General Materials Science Ceramic Thin film Composite material Carbon Deposition (law) |
| Zdroj: | Materials Science Forum. :645-656 |
| ISSN: | 1662-9752 |
| DOI: | 10.4028/www.scientific.net/msf.52-53.645 |
| Popis: | Recent work on the properties of diamondlike carbon films and their dependence on preparation conditions are reviewed. The results of the study indicate that plasma deposition enables one to deposit a variety of amorphous hydrogenated carbon (a-C:H ) films exhibiting more diamondlike behavior to more graphitic behavior. The plasma-deposited a-C:H can be effectively used as hard, wear-resistant, and protective lubricating films on ceramic materials such as Si(sub 3)N(sub 4) under a variety of environmental conditions such as moist air, dry nitrogrn, and vacuum. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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