First Demonstration of 300mm InGaAs-On-Insulator Substrates Fabricated using the Smart CutTM Technology

Autor:	M. Martin, E. Beche, C. Veytizou, S. Sollier, G. Gaudin, S. Arnaud, S. David, D. Delprat, A. Salaun, T. Baron, T. Signamarcheix, J. Widiez, Frederic Mazen, F. Madeira, Sylvie Favier, Helen Grampeix
Rok vydání:	2015
Předmět:	Materials science business.industry Optoelectronics Insulator (electricity) business
Zdroj:	Extended Abstracts of the 2015 International Conference on Solid State Devices and Materials.
DOI:	10.7567/ssdm.2015.n-5-3
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::228302747c05ff27c2345cbb847aae52 https://doi.org/10.7567/ssdm.2015.n-5-3 Zobrazit plný text záznamu