Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics

Autor:	Yoshikazu Hirai, Hiromasa Yagyu, Osamu Tabata, Toshiyuki Tsuchiya, Akio Uesugi, Yoshihide Makino, Koji Sugano
Rok vydání:	2012
Předmět:	Materials science Polymers and Plastics Organic Chemistry Epoxy Bending Nanoindentation Molecular dynamics Resist visual_art Materials Chemistry visual_art.visual_art_medium Elongation Composite material Elastic modulus
Zdroj:	Polymer. 53:4834-4842
ISSN:	0032-3861
DOI:	10.1016/j.polymer.2012.08.050
Popis:	The mechanical properties of an epoxy-based chemically amplified resists with various cross-linking ratios were simulated using a newly developed coarse-grained molecular dynamics simulation that employs a bead–spring model. Models with the different cross-linking ratios were created in the molecular dynamics calculation step and uniaxial elongation simulations were performed. The results reveal that the simulated elastic modulus of the resist modeled by the Kremer–Grest model with an extended angle bending potential depends on the cross-linking ratio, its dependency exhibits good agreement with that determined by nanoindentation tests.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::22745f48058ab084cc920c81398f139d https://doi.org/10.1016/j.polymer.2012.08.050 Zobrazit plný text záznamu Full Text from ScienceDirect