Design of a 500kA, 100ns, 40pps Pulser to Power a IkW X-pinch Soft X-ray Source

Autor:	S. C. Glidden, D.A. Hammer, D.H. Kalantar
Rok vydání:	2005
Předmět:	Soft x ray Materials science Electricity generation Pulse circuits Resist business.industry Pinch Microelectronics Optoelectronics X-ray lithography business Power (physics)
Zdroj:	Twentieth Conference Record on Power Modulator Symposium.
DOI:	10.1109/modsym.1992.492524
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::22561d4af2b455da147fac22d4f111d4 https://doi.org/10.1109/modsym.1992.492524 Zobrazit plný text záznamu