Measurement of Low Concentrations of Hydrogen in Oxygen By Using Sensors Based on MIS-structures

Autor: M O Etrekova, A V Litvinov
Rok vydání: 2018
Předmět:
Zdroj: KnE Engineering. 3:202
ISSN: 2518-6841
DOI: 10.18502/keg.v3i6.2993
Popis: It is shown that the possibility of using MIS-sensors as sensitive elements of gas analyzers for monitoring the concentration of hydrogen in the range of 5–10−5... 1% in oxygen. The article reports on the possibility of measuring low concentrations of hydrogen (0.5... 10 ppm) in oxygen using a MIS-sensor (metalinsulator-semiconductor).
Databáze: OpenAIRE