Measurement of Low Concentrations of Hydrogen in Oxygen By Using Sensors Based on MIS-structures
Autor: | M O Etrekova, A V Litvinov |
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Rok vydání: | 2018 |
Předmět: | |
Zdroj: | KnE Engineering. 3:202 |
ISSN: | 2518-6841 |
DOI: | 10.18502/keg.v3i6.2993 |
Popis: | It is shown that the possibility of using MIS-sensors as sensitive elements of gas analyzers for monitoring the concentration of hydrogen in the range of 5–10−5... 1% in oxygen. The article reports on the possibility of measuring low concentrations of hydrogen (0.5... 10 ppm) in oxygen using a MIS-sensor (metalinsulator-semiconductor). |
Databáze: | OpenAIRE |
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