Electron probe microanalysis inverse modeling

Autor:	L.M Richardson, Horst W. Wagner, Herbert Störi, Wolfgang S. M. Werner
Rok vydání:	2001
Předmět:	Physics Nuclear and High Energy Physics Mathematical model Monte Carlo method Simulated annealing Analytical chemistry Dynamic Monte Carlo method Inverse Context (language use) Electron microprobe Instrumentation Microanalysis Computational physics
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 184:450-457
ISSN:	0168-583X
Popis:	A method was developed which allows one to extract structural information from results of a set of electron probe microanalysis experiments performed under different experimental conditions. The method is based on the minimization of the χ2 deviation between experimental and theoretical characteristic X-ray intensities. A Monte Carlo code was implemented to provide a theoretical model describing the signal formation in electron probe microanalysis for a known sample structure. The technique of simulated annealing was identified as an advantageous approach for minimization in the present context. As a first test, the method has been successfully applied to model data of several different types of sample structures. A specific example, the determination of depth and size of embedded particles, is presented and illustrates the implemented approach.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::222f9e1923078c0b2756d5ef632506db https://doi.org/10.1016/s0168-583x(01)00773-x Zobrazit plný text záznamu Full Text from ScienceDirect