A MEMS surface fence for wall shear stress measurement with high sensitivity
| Autor: | Bing He Ma, Cheng Yu Ma |
|---|---|
| Rok vydání: | 2015 |
| Předmět: |
Microelectromechanical systems
Fence (finance) Materials science Cantilever business.industry Acoustics 02 engineering and technology Structural engineering 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Electronic Optical and Magnetic Materials 010309 optics Surface micromachining Hardware and Architecture 0103 physical sciences Shear stress Calibration Electrical and Electronic Engineering 0210 nano-technology business Sensitivity (electronics) Excitation |
| Zdroj: | Microsystem Technologies. 22:239-246 |
| ISSN: | 1432-1858 0946-7076 |
| Popis: | In this paper, an optimized micro-fabricated surface fence with high sensitivity is presented for measurement of wall shear stress. In order to improve the bending stress and thereby enhance the sensitivity of the sensor, the cantilever structure of sensor (the sensing element) is designed and optimized by optimization analysis and orthogonal experimental design. Several sensors are fabricated using the micromachining technology with the sensing element having a width of 5 mm, a thickness of 20 μm and a height of either 2,200 or 1,700 μm. Calibration against a Preston Tube over a range of approximately ±0.7 Pa demonstrates that the sensors have sensitivity extended up to 2.3 mV/(V·Pa), at least 13 % improvement in sensitivity compared to the previous MEMS surface fence with the same thickness of sensing element. The paper also introduces an acoustic excitation method to detect the resonant frequency of the MEMS surface fence, which features a very little deviation compared with the modal FE-analysis. |
| Databáze: | OpenAIRE |
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