InGaP/InGaAs/GaAs metal-oxide-semiconductor pseudomorphic high electron mobility transistor with a liquid phase oxidized InGaP gate

Autor: Po-Wen Sze, Yu Ju Lin, Kuan-Wei Lee, Yu-Chang Lee, Nan-Ying Yang, Mau-Phon Houng, Yeong-Her Wang
Rok vydání: 2005
Předmět:
Zdroj: Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004..
DOI: 10.1109/icsict.2004.1435305
Popis: InGaP/InGaAs/GaAs metal-oxide-semiconductor pseudomorphic high electron mobility transistors (MOS-PHEMTs) are reported. The gate dielectric is formed by oxidizing InGaP material in liquid phase. As compared to its counterpart PHEMTs, it can be observed that the MOS-PHEMT has a larger gate swing voltage, a lower gate leakage current and a higher breakdown voltage. Consequentially, the studied MOS-PHEMT provides the promise for high-power applications.
Databáze: OpenAIRE