Improving the Morphological and Optical Properties of Sputtered Indium Tin Oxide Thin Films by Adopting Ultralow-Pressure Sputtering
| Autor: | Jae Kyeong Jeong, Bong Seop Yang, Jaeyeong Heo, Myung Soo Huh, Hyeong Joon Kim, Seok-jun Won, Jaewon Song, Cheol Seong Hwang |
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| Rok vydání: | 2009 |
| Předmět: |
Materials science
Renewable Energy Sustainability and the Environment business.industry Nanotechnology Condensed Matter Physics Electrochemistry Surfaces Coatings and Films Electronic Optical and Magnetic Materials Indium tin oxide Sputtering Materials Chemistry Optoelectronics Deposition (phase transition) Thin film business Layer (electronics) |
| Zdroj: | Journal of The Electrochemical Society. 156:J6 |
| ISSN: | 0013-4651 |
| DOI: | 10.1149/1.3005562 |
| Popis: | cm were also achieved using a continuous two-step depositionprocess, in which the initial layer was deposited using ULPS and then the final layer was deposited with a SP of 6.7 −110 Pa,without the use of any other additional steps. Both the ULPS and continuous two-step deposition methods were found to beeffective for producing ITO thin films with enhanced morphologies that make them suitable for use in display devices.© 2008 The Electrochemical Society. DOI: 10.1149/1.3005562 All rights reserved.Manuscript submitted June 26, 2008; revised manuscript received September 3, 2008. Published November 5, 2008. |
| Databáze: | OpenAIRE |
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