TNO TPD contributions to high-precision optical metrology: a Darwin metrology breadboard for ESA

Autor: Bertrand Calvel, Teun C. van den Dool, Denys Dontsov, B.C. Braam, Isabel Cabeza Vega, Eberhard Manske, Wolfgang Poeschel, Adrianus L. Verlaan, Zoran Sodnik, Rainer Sesselman, Thilo Schuldt
Rok vydání: 2004
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.559915
Popis: A Darwin precursor breadboard, comprising both fine lateral and longitudinal metrology sensors was designed, built and partially tested. The lateral metrology sensor was designed and built by TNO TPD and more than meets the imposed requirements. The longitudinal metrology sensor consists of a dual wavelength interferometer with an integrated delay line for optical path stabilisation. Here TNO TPD supplied the delay line and implemented the optical path difference stabilisation control. Experiments under ambient conditions show that noise reduction up to five orders of magnitude is achievable.
Databáze: OpenAIRE