Casimir effect on the pull-in parameters of nanometer switches

Autor: Lin WH(林文惠), Ya-Pu Zhao
Rok vydání: 2005
Předmět:
Zdroj: Microsystem Technologies. 11:80-85
ISSN: 1432-1858
0946-7076
Popis: Casimir effect on the critical pull-in gap and pull-in voltage of nanoelectromechanical switches is studied. An approximate analytical expression of the critical pull-in gap with Casimir force is presented by the perturbation theory. The corresponding pull-in parameters are computed numerically, from which one can notice the nonlinear effect of Casimir force on the pull-in parameters. The detachment length has been presented, which increases with increasing thickness of the beam.
Databáze: OpenAIRE