All electronic defect inspection, management, and reporting system

Autor:	K. Bernstein, P. Dao, B. Anthony, L. Union, D. Kolar, J. Brenizer, J. Lin, T.R. White, C. Apblett, A. Chase, V. Sheth, M. Miscione
Rok vydání:	2003
Předmět:	Image sampling Engineering business.industry Semiconductor device fabrication medicine.medical_treatment Condition monitoring Hardware_PERFORMANCEANDRELIABILITY computer.file_format Reliability engineering medicine Bitmap business Reporting system computer Decision analysis cycle
Zdroj:	10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295).
DOI:	10.1109/asmc.1999.798175
Popis:	Described is an essentially all electronic defect inspection, management, and reporting system, integrating defect data, images, and bit maps. It is shown how the system increases the efficiency of inline defect monitoring by utilizing ADC, allowing dispositioning of lots at lower levels in the organization, focusing defect reduction efforts on those defects that affect yield, and shortening failure analysis cycle time.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::212b7e7957f64f62f8a277a1d75f723b https://doi.org/10.1109/asmc.1999.798175 Zobrazit plný text záznamu