| Autor: |
T.H. Hsu, Shou-Gwo Wuu, Ho-Ching Chien, Chien-Hsien Tseng, C.S. Wang, S.F. Chen, Chih-Wei Lin, Y.K. Fang, Cheng-I Lin, Dun-Nian Yaung, Jeng-Shyan Lin |
| Rok vydání: |
2004 |
| Předmět: |
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| Zdroj: |
IEEE Electron Device Letters. 25:22-24 |
| ISSN: |
0741-3106 |
| DOI: |
10.1109/led.2003.821597 |
| Popis: |
Light guide, a novel dielectric structure consisting of PE-Oxide and FSG-Oxide, has been developed to reduce crosstalk in 0.18-/spl mu/m CMOS image sensor technology. Due to the difference in refraction index (1.46 for PE-Oxide and 1.435 for FSG-Oxide), major part of the incident light can be totally reflected at the interface of PE-Oxide/FSG-Oxide, as the incidence angle is larger than total reflection angle. With this light guide, the pixel sensing capability can be enhanced and to reduce pixel crosstalk. Small pixels with pitch 3.0-/spl mu/m and 4.0-/spl mu/m have been characterized and examined. In 3.0-/spl mu/m pixel, optical crosstalk achieves 30% reduction for incidence angle of light at 10/spl deg/. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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