A yield prediction model and cost of ownership for productivity enhancement beyond imec 5nm technology node
| Autor: | Yi-Pei Tsai, Yi-Han Chang, Jane Wang, Darko Trivkovic, Kurt Ronse, Ryoung-Han Kim |
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| Rok vydání: | 2022 |
| Zdroj: | DTCO and Computational Patterning. |
| DOI: | 10.1117/12.2617415 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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