Kinetics of laser-induced Au pyrolytic deposition from the liquid phase

Autor:	M.R. Brook, K. I. Grandberg, Georgii A Shafeev
Rok vydání:	1991
Předmět:	chemistry.chemical_classification Chemistry Kinetics Inorganic chemistry Analytical chemistry Crystal growth General Chemistry Activation energy Laser law.invention law Deposition (phase transition) General Materials Science Wafer Pyrolytic carbon Inorganic compound
Zdroj:	Applied Physics A. 52:78-81
ISSN:	1432-0630 0947-8396
DOI:	10.1007/bf00323689
Popis:	Kinetics of Au pyrolytic deposition from organic solutions of triphenyl phosphine complexes induced by a copper-vapor laser beam is studied experimentally. Activation energies Ta and pre-exponential factors are determined for 7 different Au complexes. Measured Ta values range from 1800 K to 9400 K. The average temperature of the GaAs wafer is found to be 70° C for a laser beam power of 10 mW.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::20e3e4db95ea6c188566b0228e4f719f https://doi.org/10.1007/bf00323689 Zobrazit plný text záznamu Full text from SpringerLink