Preparation of ZnO substrates for epitaxy: Structural, surface, and electrical properties

Autor:	Christian Neumann, S. Graubner, Bruno K. Meyer, Alois Krost, Jürgen Bläsing, N. Volbers
Rok vydání:	2007
Předmět:	Resistive touchscreen Materials science Physics and Astronomy (miscellaneous) Annealing (metallurgy) business.industry Wide-bandgap semiconductor Epitaxy Crystallography Full width at half maximum Electrical resistivity and conductivity Optoelectronics Ingot business Electrical conductor
Zdroj:	Applied Physics Letters. 90:042103
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.2434170
Popis:	The authors investigate the influence of a high temperature annealing in O2 atmosphere on the structural properties of ZnO substrates. Only at temperatures above 1100°C are atomic step heights and terraces seen by atomic force microscopy. The structural properties of the substrates were determined from the full width at half maximum (FWHM) of the rocking curve of the (0002) reflection. The FWHM is between 28 and 33arcsec for different substrates cut from one ingot but does not change with the annealing. The electrical properties, however, change from highly resistive to n-type conductive, which makes the substrates suitable for top-to-bottom contacting.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::20af9d0c6bc26bb3c595f0af3d55ab09 https://doi.org/10.1063/1.2434170 Zobrazit plný text záznamu