Kinetics of surface monatomic layer deposition

Autor:	A. S. Dolgov, N. V. Stetsenko
Rok vydání:	2012
Předmět:	Monatomic ion Chemistry Evaporation Deposition (phase transition) Surface layer Thin film Atomic physics Layer (electronics) Molecular physics Intensity (heat transfer) Dynamic equilibrium Surfaces Coatings and Films
Zdroj:	Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 6:95-99
ISSN:	1819-7094 1027-4510
DOI:	10.1134/s1027451012010065
Popis:	The filling of a surface layer with atoms incident from the outside has been studied in the framework of a one-dimensional model. Macroscopic dynamic equilibrium is regarded as the result of microscopic equilibrium between possible atomic configurations in the presence of particle flux to the surface, the evaporation of these particles, and their mutual influence. The dependences of the degree of surface coverage on the external action intensity, features of atom-substrate interaction and interaction between atoms are found. The conditions for the formation of a rarified layer, its complete filling, clot formation, and regular distribution were determined.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::20a32e5bd2fd75de2529f527c920b773 https://doi.org/10.1134/s1027451012010065 Zobrazit plný text záznamu Full text from SpringerLink