The study of influence of working pressure on mode conversion of argon radio-frequency inductively coupled plasma
| Autor: | Junfang Chen, Youpeng Zhang, Wenwen Xiong, Congzheng Song, Yan Wang |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Argon Atmospheric pressure Chemistry Analytical chemistry chemistry.chemical_element Plasma Condensed Matter Physics 01 natural sciences 010305 fluids & plasmas Surfaces Coatings and Films symbols.namesake Hysteresis Physics::Plasma Physics Inductively coupled plasma atomic emission spectroscopy 0103 physical sciences symbols Electron temperature Langmuir probe Atomic physics Inductively coupled plasma Instrumentation |
| Zdroj: | Vacuum. 132:16-21 |
| ISSN: | 0042-207X |
| DOI: | 10.1016/j.vacuum.2016.07.022 |
| Popis: | Electron temperature and plasma density was measured with change of working air pressure by Langmuir probe at a given power. Radio-frequency (rf) inductively coupled plasma (ICP) discharge mode conversion is determined by optical emission spectrum (OES) with the increase of gas pressure at different power. The results indicate that plasma discharge mode can change from E mode to H mode and spectral intensity appears inverse hysteresis phenomenon with the change of air pressure. The hysteresis width decreases with the increase of power and the hysteresis is no longer present when the power is 420 W and 435 W. Moreover, the jump pressure of E-H transition is gradually reduced with the corresponding increase of discharge power. ICP discharge mode appears E-H-E phenomenon with the increase of air pressure. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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