High resolution X-ray diffraction of GaN grown on Si (111) by MOVPE
| Autor: | M. S. Bergaoui, N. Chaaben, A. Fouzri, T. Boufaden, B. El Jani |
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| Rok vydání: | 2006 |
| Předmět: |
Materials science
business.industry Scanning electron microscope General Physics and Astronomy Surfaces and Interfaces General Chemistry Substrate (electronics) Condensed Matter Physics Epitaxy Mosaicity Surfaces Coatings and Films Monocrystalline silicon Crystallography X-ray crystallography Surface roughness Optoelectronics Metalorganic vapour phase epitaxy business |
| Zdroj: | Applied Surface Science. 253:241-245 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/j.apsusc.2006.05.128 |
| Popis: | High temperature GaN layers have been grown on Si (1 1 1) substrate by metalorganic vapor phase epitaxy (MOVPE). AlN was used as a buffer layer and studied as a function of thickness and growth temperature. The growth was monitored by in situ laser reflectometry. High resolution X-ray diffraction (HRXRD) revealed that optimized monocrystalline GaN was obtained for a 40 nm AlN grown at 1080 °C. This is in good agreement with the results of morphological study by scanning electron microscopy (SEM) and also confirmed by atomic force microscopy (AFM) observations. The best morphology of AlN with columnar structure and lower rms surface roughness is greatly advantageous to the coalescence of the GaN epilayer. Symmetric and asymmetric GaN reflections were combined for twist and stress measurements in monocrystalline GaN. It was found that mosaicity and biaxial tensile stress are still high in 1.7 μm GaN. Curvature radius measurement was also done and correlated to the cracks observations over the GaN surface. |
| Databáze: | OpenAIRE |
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