Examination of ion-induced Auger electron spectra of Ti, Cr and Co in a mass-selecting Focused Ion Beam with a gold–silicon liquid metal source

Autor: R. Hull, H. Parvaneh
Rok vydání: 2014
Předmět:
Zdroj: Vacuum. 110:69-73
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2014.08.012
Popis: Ion induced Auger electron spectroscopy is a technique where Auger electrons are produced as a result of energetic ion impact. In this paper, the ion–induced electron spectra of three of the transition metals; Ti, Cr and Co by Si ++ and Au + ions accelerated to 30 and 60 keV are studied. Aside from the low energy plasmon peaks, sharp M 23 M 45 M 45 Auger transitions with high signal to noise ratio attributed to the metal targets and, in the samples bombarded by Si ++ ions, L 23 MM transition from Si incident ion are also detected. Broad tails next to the main metal Auger peaks are attributed to interatomic transitions between the incident ion and target ions.
Databáze: OpenAIRE