Detection of volatile organic compounds (VOCs) with polymer-coated cantilevers
| Autor: | M. Maute, Wolfgang Göpel, S. Raible, Udo Weimar, Heiko Ulmer, F. E. Prins, Dieter P. Kern |
|---|---|
| Rok vydání: | 1999 |
| Předmět: |
chemistry.chemical_classification
Materials science Polydimethylsiloxane Metals and Alloys Analytical chemistry Resonance Polymer engineering.material Condensed Matter Physics Toluene Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry Coating Materials Chemistry engineering Wafer Electrical and Electronic Engineering Absorption (electromagnetic radiation) Instrumentation Octane |
| Zdroj: | Sensors and Actuators B: Chemical. 58:505-511 |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/s0925-4005(99)00110-0 |
| Popis: | Changes in the resonance frequency of polymer-coated cantilevers due to gas absorption is shown to be a promising detection mechanism for gases. We prepared SiN x cantilevers based on micromachined Si wafers and used polydimethylsiloxane (PDMS) as polymeric prototype coating. We measured the resonance frequency response of cantilevers end-coated with polymer on exposure to different vapor concentrations of n -octane, toluene, and n -butanole and determined high sensitivities with respect to cantilevers without polymer coating. By using the first higher resonance mode, we found with our configuration sensitivities up to −0.0988 Hz/ppm for small concentrations of n -octane. It is demonstrated here how the sensitivity of the chemical sensor can be improved by varying the deposited polymer mass. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect