Characterization of transfer-bonded silicon bolometer arrays
| Autor: | Ulf J. Wallgren, Johan Pejnefors, Michael Haggblad, Göran Stemme, Per-Erik Hellström, Matteo Dainese, Frank Niklaus |
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| Rok vydání: | 2004 |
| Předmět: |
Materials science
Fabrication Silicon business.industry Bolometer chemistry.chemical_element Hardware_PERFORMANCEANDRELIABILITY Characterization (materials science) law.invention chemistry law Boron doping Hardware_INTEGRATEDCIRCUITS Optoelectronics Boron business Hardware_LOGICDESIGN Cmos compatible |
| Zdroj: | SPIE Proceedings. |
| ISSN: | 0277-786X |
| DOI: | 10.1117/12.565894 |
| Popis: | In this paper we present the design, fabrication and characterization of arrays of boron doped polycryslalline silicon bolometers, The bolometer arrays have been fabricated using CMOS compatible wa ... |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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