Infrared spectroscopy investigation of various plasma-deposited polymer films irradiated with 170keV He+ ions

Autor:	Steven F. Durrant, Celso U. Davanzo, M. A. Bica de Moraes, Rogério Valentim Gelamo, G.Z. Gadioli, B. C. Trasferetti, Francisco Rouxinol
Rok vydání:	2006
Předmět:	Nuclear and High Energy Physics Materials science Infrared Analytical chemistry Infrared spectroscopy Chemical vapor deposition Polysilazane chemistry.chemical_compound chemistry Plasma-enhanced chemical vapor deposition Irradiation Fourier transform infrared spectroscopy Thin film Instrumentation
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 249:162-166
ISSN:	0168-583X
DOI:	10.1016/j.nimb.2006.03.105
Popis:	This work illustrates the advantages of using p-polarized radiation at an incidence angle of 70° in contrast to the conventional unpolarized beam at normal (or near-normal) incidence for the infrared spectroscopic study of polycarbosilane, polysilazane and polysiloxane thin films synthesized by plasma enhanced chemical vapor deposition (PECVD) and subsequently irradiated with 170 keV He+ ions at fluences from 1 × 1014 to 1 × 1016 cm−2. Several bands not seen using the conventional mode could be observed in the polarized mode.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2042731748dfb433de58326522987529 https://doi.org/10.1016/j.nimb.2006.03.105 Zobrazit plný text záznamu Full Text from ScienceDirect