Monte Carlo calculation of the contribution of backscattered electrons to secondary electron emission from aluminium

Autor: K L Hunter, H K Wagenfeld, D L Swingler, I K Snook
Rok vydání: 1990
Předmět:
Zdroj: Journal of Physics D: Applied Physics. 23:1738-1743
ISSN: 1361-6463
0022-3727
DOI: 10.1088/0022-3727/23/12/039
Popis: A Monte Carlo model for the simulation of electron penetration into aluminium and for the generation and emission of secondary electrons is presented. Monte Carlo calculations for the penetration and backscattering of primary electrons show good agreement with experiment, while the dependence of the secondary electron yield on the primary electron energy show qualitative agreement with experimental measurements. beta , which is defined as the relative efficiency of backscattered electrons for producing secondary electrons which escape the surface over that of the primary electrons on their inward path, is found to be approximately 6-7 for primary electrons in the energy range 3-25 keV.
Databáze: OpenAIRE