Surface profile measurement based on continuous wavelet transform in line-scan dispersive interferometry

Autor: Guanhua Zhao, Qianwen Weng, Tong Guo
Rok vydání: 2020
Předmět:
Zdroj: 2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems.
DOI: 10.1117/12.2540385
Popis: This paper presents a signal processing method based on continuous wavelet transform in our line-scan dispersive interferometric system. Our method enables us to extract phase information from the spectrum by applying continuous wavelet transform, which is more effective and reliable in analyzing non-stationary signal compared with FT transform. Experimental results obtained by measuring a step standard with a height of 1.806μm reveal that this method has high accuracy and a good performance over noise resistance, which makes it suitable for complicated in-line measurement condition.
Databáze: OpenAIRE