| Popis: |
Miniature micromachined Fabry-Perot interferometers (FPI) are composed of the corrugated silicon diaphragm and glass substrate. The flatness of the silicon diaphragms with a dimension of 4.2 mm in diameter can be controlled within 0.12 (mu) m. The optical depostion condition to grow thin Au films, as a reflector of FPI, can be established by studying the optical properties Au-photoresistent-As etalons. The interference spectra of micro-machined gap-tunable FPI with a structure of Si-Cr-Au-air-Au-Cr-glass have been observed in the near infrared regions. The transmittance and FWHM bandwidth of the as-bonded FPI is 5.6% and 3.84 nm at a peak wavelength of 1578.4 nm, respectively. |
