Gas-sensitive properties of thin nickel oxide films
| Autor: | P. G. Bespalova, S. I. Pavlov, Leonid A. Filatov, E. M. Tanklevskaya, S. E. Alexandrov, Anastasia S. Kondrateva |
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| Rok vydání: | 2017 |
| Předmět: |
General Chemical Engineering
Nickel oxide Inorganic chemistry 02 engineering and technology General Chemistry Chemical vapor deposition 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences Toluene 0104 chemical sciences Hexane Ammonia chemistry.chemical_compound chemistry Electrical resistance and conductance Acetone 0210 nano-technology Benzene |
| Zdroj: | Russian Journal of Applied Chemistry. 90:846-852 |
| ISSN: | 1608-3296 1070-4272 |
| DOI: | 10.1134/s1070427217060039 |
| Popis: | The results of a study of the gas-sensitive properties of nickel oxide layers with respect to n-hexane, acetone, ethanol, benzene, o-xylene, toluene and ammonia are presented. NiO layers 100 ± 5 nm thick were obtained by chemical vapor deposition in the systems (EtCp)2Ni–О2–Ar and (EtCp)2Ni–О3–О2–Ar. The electrical resistance of the layers changes in the presence of hexane, ethanol, benzene, and ammonia vapors. The electrical resistance of the obtained layers changed in the presence of vapors of hexane, ethanol, benzene and ammonia. Response and recovery time of the sensing element of the gas sensors did not exceed 6 s in the temperature range 500–600 K. |
| Databáze: | OpenAIRE |
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