| Autor: |
Christopher R. Stockbridge, Euan Ramsay, Bennett B. Goldberg, Abdulkadir Yurt, Yang Lu, Selim Unlu |
| Rok vydání: |
2012 |
| Předmět: |
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| Zdroj: |
Frontiers in Optics 2012/Laser Science XXVIII. |
| DOI: |
10.1364/fio.2012.ftu3a.7 |
| Popis: |
We demonstrate spatial mapping of time-dependent electrical activity of ICs through dual-phase interferometric back-side imaging with a silicon aplanatic solid immersion lens. Inverter chains in a 180nm technology node test chip are investigated at the clock frequency of the circuit. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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