| Autor: |
Nicholas E. Bousse, Hyun-Keun Kwon, Ze Zhang, Dusan Coso, Thomas W. Kenny, Arun Majumdar, Seid H. Sadat, James M. L. Miller, Gabrielle D. Vukasin |
| Rok vydání: |
2020 |
| Předmět: |
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| Zdroj: |
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: |
10.1109/mems46641.2020.9056428 |
| Popis: |
We observe significant temperature hysteresis in the resonant frequency and quality factor of silicon piezoresistive microcantilevers from room temperature down to 40 K. The hysteresis becomes increasingly pronounced as the support beam length is reduced from $100\ \mu \mathrm{m}$ to $30\ \mu \mathrm{m}$ , leading to over a twenty-fold difference in $Q$ values between the temperature sweep downwards and upwards for the $30\ \mu \mathrm{m}$ support beam device. Our work suggests that temperature hysteresis is an important consideration for thermal-piezoresistive oscillators and other microelectromechanical resonators that require multiple anchor points. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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