TiO2-Based Ultraviolet Photodetectors

Autor: W. S. Shih, Kin-Tak Lam, Liang-Wen Ji, Teen-Hang Meen, Jenn-Kai Tsai, Walter Water, Y. F. Chen, Y. J. Hsiao
Rok vydání: 2013
Předmět:
Zdroj: Integrated Ferroelectrics. 143:65-70
ISSN: 1607-8489
1058-4587
DOI: 10.1080/10584587.2013.795848
Popis: This study demonstrates that anatase TiO2 thin films were grown on Corning glass substrates by radio frequency magnetron sputtering and were then used to fabricate metal-semiconductor-metal (MSM) ultraviolet (UV) photodetectors (PDs) with different contact electrodes (Ag or Au). With a 320-nm illumination and 5 V applied bias, the responsivities for the Ag/TiO2/Ag and Au/TiO2/Au MSM PDs were 4.31 and 16.6 A/W, respectively. Additionally, the photoconductive gain and Schottky barrier height at the Ag/TiO2 and Au/TiO2 interfaces were also discussed in the investigation.
Databáze: OpenAIRE