Chemical vapor detection using microfabricated flexural plate silicon resonator arrays

Autor: Chris Daly, Jane Pepper, Rob Bousquet, Brian T. Cunningham, Christopher Clapp, Brenda Hugh, Marc S. Weinberg, Richard A. Kant
Rok vydání: 2000
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.394060
Popis: This presentation will describe the design, fabrication, and testing of 2-element, and 8-element micro-Chemical Analysis Array ((mu) CANARY) sensor chips and address electronics. The detailed performance characterization of (mu) CANARY sensors for vapor and liquid phase detection will be presented. For vapor detection, NRL has applied polymer receptor coatings targeted at detection of chemical weapon agents, and has performed extensive chemical vapor exposure tests using two chemical weapon simulants and four vapor phase interferents. Data describing temperature dependence, long term/short term drift stability, detection limits, detection linearity, and vapor selectivity will be presented.
Databáze: OpenAIRE