5-DOF cone-shaped piezoelectric positioning robot for optical systems

Autor:	Andrius Čeponis, Dalius Mažeika, Piotr Vasiljev, Regimantas Bareikis
Rok vydání:	2023
Předmět:	Metals and Alloys Electrical and Electronic Engineering Condensed Matter Physics Instrumentation Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Sensors and Actuators A: Physical. 354:114280
ISSN:	0924-4247
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1f35c8d108ebba031a641ebe3c5ce0df https://doi.org/10.1016/j.sna.2023.114280 Zobrazit plný text záznamu Full Text from ScienceDirect