Calibration of Modulation Transfer Function of Surface Profilometers with 1-D and 2-D Binary Pseudo-Random Array Standards

Autor:	Peter Z. Takacs, Wayne R. McKinney, Valeriy V. Yashchuk
Rok vydání:	2008
Předmět:	Materials science Microscope business.industry Astrophysics::Instrumentation and Methods for Astrophysics Binary number Grating law.invention Interferometry Optics Modulation law Optical transfer function Calibration Profilometer business
Zdroj:	Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing.
DOI:	10.1364/oft.2008.otua2
Popis:	We suggest and describe the use of a binary pseudo-random grating as a standard test surface for calibration of the modulation transfer function of microscopes. Results from calibration of a MicromapTM-570 interferometric microscope are presented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1f2d015212d4ee2121984693daa4e26e https://doi.org/10.1364/oft.2008.otua2 Zobrazit plný text záznamu