| Popis: |
Single-phase delafossite type Mg-doped copper-chromium oxide thin films were prepared on c-sapphire, quartz glass and n-Si substrates by direct current (DC) magnetron sputtering using a CuCr0.97Mg0.03O2 (CCMO) ceramic target, followed by post annealing at 800 °C in a nitrogen atmosphere. X-ray diffraction (XRD) revealed that the film deposited on c-plane sapphire was highly c-axis oriented, while the films on quartz glass and Si only showed weak (0 1 2) peak. The transparencies of the films on c-sapphire and quartz glass were over 60 % in the visible light region and the direct bandgap of both films were estimated to be 3.16 eV. The in-plane resistivities were 0.24 Ωcm and 7.68 Ωcm for the crystallized films on c-sapphire and quartz glass, respectively. The electrical property of the formed CCMO/n-Si junction was found to be rectifying with a ratio of ~15 at ±2 V. |
