Statistical Process Control for Semiconductor Manufacturing Processes

Autor:	Hironobu Kawamura, Naru Ishii, Masanobu Higashide, Ken Nishina
Rok vydání:	2010
Předmět:	Chemical process Computer science Semiconductor device fabrication Process (engineering) business.industry Control chart Statistical process control Process engineering business
Zdroj:	Frontiers in Statistical Quality Control 9 ISBN: 9783790823790
DOI:	10.1007/978-3-7908-2380-6_5
Popis:	This paper considers statistical process control (SPC) for the semiconductor manufacuturing industry, where automatic process adjustment and process maintenance are widely used. However, SPC has been developed in parts industry an, thus, application of SPC to chemical processes such as those in the semiconductor manufacuturinghas not been systematically investigated
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1edeebdd6149e087ac3d10aeee66ee9a https://doi.org/10.1007/978-3-7908-2380-6_5 Zobrazit plný text záznamu