| Autor: |
Mohamed Ketata, Maxime Fontaine, Hubert Polaert, Philippe Eudeline, Charles Regard, Christian Gauthier, Olivier Latry, Eric Joubert |
| Rok vydání: |
2011 |
| Předmět: |
|
| Zdroj: |
2011 27th Annual IEEE Semiconductor Thermal Measurement and Management Symposium. |
| DOI: |
10.1109/stherm.2011.5767201 |
| Popis: |
In this paper is presented a new approach for measuring physical values of micro-electronic compounds. Indeed an optical system is used to quantify simultaneously surface temperature and expansion of a component. This is done with a Michelson interferometer. To compare the method, the measured temperature was correlated with two other methods, IR camera and ESD diode. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
