Micromechanical characterization of laser consolidated nanoparticle ITO layers
Autor: | Florian Mikschl, Mathias Göken, M. Baum, Johannes Heberle, Benoit Merle, Michael Schmidt |
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Rok vydání: | 2017 |
Předmět: |
010302 applied physics
Materials science Metals and Alloys Nanoparticle 02 engineering and technology Surfaces and Interfaces Nanoindentation 021001 nanoscience & nanotechnology Laser 01 natural sciences Fluence Surfaces Coatings and Films Electronic Optical and Magnetic Materials Indium tin oxide law.invention Scratch law 0103 physical sciences Materials Chemistry Thin film Composite material 0210 nano-technology computer computer.programming_language Visible spectrum |
Zdroj: | Thin Solid Films. 642:214-218 |
ISSN: | 0040-6090 |
Popis: | Indium tin oxide (ITO) is one of the few materials that combine optical transparency in the visible light spectrum with high electrical conductivity. These properties provide functionality in many optoelectronic applications but their application to certain fields is limited by the need to achieve advanced mechanical properties, hence requiring micromechanical characterization methods. In this paper, ITO coatings of 94–325 nm thickness are produced from spin-coating of nanoparticle ink followed by consolidation by nanosecond UV laser irradiation in ambient air. These ITO layers are investigated by nanoindentation and scratch testing, which provide measurements of their hardness, Young's modulus and scratch resistance. This allows understanding the effect of the process parameters on the mechanical properties of the layers. It is concluded that a laser fluence of 59 mJ/cm 2 provides an effective mechanical consolidation of ITO particles up to 150 nm thickness. |
Databáze: | OpenAIRE |
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