Changes in the vacancy size distribution induced by non-bonded hydrogens in hydrogenated amorphous silicon

Autor: Mitsuoki Hishida, Takeyuki Sekimoto, Mitsuhiro Matsumoto, Akihiko Sagara, Akira Terakawa
Rok vydání: 2016
Předmět:
Zdroj: Journal of Non-Crystalline Solids. 447:207-211
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2016.05.030
Popis: It was demonstrated that the presence of large amounts (≥ 2.8 at.%) of non-bonded hydrogens (NBHs) in hydrogenated amorphous silicon (a-Si:H) resulted in changes in the vacancy size distribution, where the vacancy size distribution was determined using positron annihilation lifetime spectroscopy. NBHs in small vacancies induced large nanovoids (>~1 nm), via the relaxation of internal stresses in the a-Si network, without decreasing the atomic number density of the silicon.
Databáze: OpenAIRE