Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology

Autor:	Richard Ciesielski, Leonhard M. Lohr, Hans Mertens, Anne-Laure Charley, Rudi de Ruyter, Janusz Bogdanowicz, Philipp Hönicke, Najmeh Abbasirad, Victor Soltwisch
Rok vydání:	2023
Zdroj:	Metrology, Inspection, and Process Control XXXVII.
DOI:	10.1117/12.2658501
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1e73365051f1ee620822bdd5cd9f5730 https://doi.org/10.1117/12.2658501 Zobrazit plný text záznamu