Design and pumping characteristics of a compact titanium–vanadium non-evaporable getter pump
| Autor: | Nariman B. Mistry, Daniel Hess, Roberto Kersevan, Yulin Li |
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| Rok vydání: | 1998 |
| Předmět: | |
| Zdroj: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 16:1139-1144 |
| ISSN: | 1520-8559 0734-2101 |
| Popis: | A compact non-evaporable getter (NEG) pump is made by stacking sintered titanium–vanadium blades recently available from SAES Getters as St185. The 50 blades are stacked between copper spacers on a stainless steel tube, and are activated by a removable heater cartridge inserted into the tube. The room temperature pumping speeds for CO and N2 are measured as a function of sorbed gas quantities at various activation temperatures and with different NEG disk spacing, in order to optimize the pump design and operation. The study shows that there is a threshold of activation at a temperature of about 340 °C and optimal pumping speed and pumping capacity can be achieved with activation temperature around 550 °C. Linear pumping speeds of about 2200 l/s m and 1300 l/s m can be achieved for CO and N2, respectively, with activation at temperatures of 500 °C for 1 h. A direct comparison shows a much higher pumping speed for the St185 than that for the St707 (Zr–V–Fe alloy, also by SAES Getters). The low activation te... |
| Databáze: | OpenAIRE |
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