Determination of the oxygen content in amorphous SiOx thin films
| Autor: | E. A. Baranov, I.E. Merkulova, A. O. Zamchiy, S. Ya. Khmel, E.A. Maximovskiy |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Amorphous silicon Suboxide Materials science 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Electronic Optical and Magnetic Materials Amorphous solid chemistry.chemical_compound chemistry Chemical engineering 0103 physical sciences Materials Chemistry Ceramics and Composites Limiting oxygen concentration Fourier transform infrared spectroscopy Thin film 0210 nano-technology Oxygen content |
| Zdroj: | Journal of Non-Crystalline Solids. 518:43-50 |
| ISSN: | 0022-3093 |
| Popis: | The bonding structure and composition of amorphous silicon suboxide (a-SiOx, 0.25 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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