Investigations of CH4, C2H2and C2H4dusty RF plasmas by means of FTIR absorption spectroscopy and mass spectrometry
Autor: | Ch. Hollenstein, P. Fayet, D. Magni, A. Affolter, Ch. Deschenaux |
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Rok vydání: | 1999 |
Předmět: |
Acoustics and Ultrasonics
Absorption spectroscopy Analytical chemistry chemistry.chemical_element Infrared spectroscopy Condensed Matter Physics Mass spectrometry Surfaces Coatings and Films Electronic Optical and Magnetic Materials Ion chemistry.chemical_compound chemistry Acetylene Fourier transform infrared spectroscopy Spectroscopy Carbon |
Zdroj: | Journal of Physics D: Applied Physics. 32:1876-1886 |
ISSN: | 1361-6463 0022-3727 |
Popis: | Infrared (IR) absorption spectroscopy and mass spectrometry have been simultaneously applied to dusty radiofrequency (RF) plasmas in methane, acetylene and ethylene. The combination of IR absorption spectroscopy and mass spectrometry allows the chemical composition and structure of the most relevant plasma-produced neutral species, the ionic plasma composition and the chemical composition of the nanometer-sized particles to be precisely identified. The production of acetylenic compounds (C2Hx) seems to be a key mechanism for the powder formation in all the investigated hydrocarbon plasmas. Electron attachment to acetylenic compounds and the following ion-neutral reactions might lead to the high-mass carbon anions, which are trapped in the plasma and finally end in powder formation. The hydrogenation of the monomer strongly influences the composition of the ions. Finally the composition of the plasma-produced particles is mainly sp3 bonded carbon and the infrared spectra show similarities to that of polyethylene. |
Databáze: | OpenAIRE |
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