Popis: |
The structure parameters and the Ti-diffusion parameters of the Integrated Optical Polarization Splitter (IOPS) affect the performance of the device greatly. By discussing these two factors quantificationally and comprehensively, we obtain a series of theoretical conclusions, which are important guidance to fabricate high-performance splitters. In particular, because of the limitation of the lithophotographical technique, there must be a flat at the end of the V-shape between the branch waveguides of the IOPS. The flat has crucial effect on the optimization procedure of the structure parameters. We have analyzed the interaction between the width of the flat and other parameters in an IOPS, which is not discussed in previous papers. Technological parameters' affection on the structure optimization is also discussed. In addition, we have fabricated a series of splitters, which have optimized TE and TM splitting ratios of 28dB and 25dB. Through experimental measurements, we have validatedthe theoretical calculations. |